OneStart

Keithley 4200A-SCS Reference Manual

Also see for 4200A-SCS: Quick Sart GuideQuick start guideQuick start guideUser manualUser manual

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Contents
  1. safety precautions
  2. Table Of Contents
  3. Table Of Contents
  4. Table Of Contents
  5. Table Of Contents
  6. Table Of Contents
  7. Table Of Contents
  8. Table Of Contents
  9. Table Of Contents
  10. Table Of Contents
  11. Table Of Contents
  12. Table Of Contents
  13. Table Of Contents
  14. Table Of Contents
  15. Table Of Contents
  16. Table Of Contents
  17. Table Of Contents
  18. Table Of Contents
  19. Table Of Contents
  20. Table Of Contents
  21. Table Of Contents
  22. Introduction
  23. A-SCS system overview
  24. Source-Measure Unit (SMU)
  25. Software features
  26. Connections and configuration
  27. Shielding and guarding
  28. Signal integrity
  29. Preamplifier connections
  30. Using the ground unit
  31. SMU circuit COMMON connections
  32. SMU and 4210-SMU overview
  33. Test equipment connections
  34. Recommended connecting cables
  35. Prober connections
  36. Control and data connections
  37. Pulse cards
  38. Standard pulse
  39. Configuring the system
  40. Source-measure hardware
  41. Source-measure hardware overview
  42. Compliance limits
  43. Source or sink
  44. I-Source operating boundaries
  45. I-Source operation examples
  46. V-Source operating boundaries
  47. Source I measure I and source V measure V
  48. Source-measure unit (SMU) with 4200-PA overview
  49. Basic SMU/preamplifier circuit configuration
  50. Operating boundaries
  51. Preamplifier terminals and connectors
  52. SENSE terminal
  53. Preamplifier mounting
  54. Ground unit (GNDU) overview
  55. Ground unit connections
  56. Ground unit terminals and connectors
  57. COMMON terminal
  58. Source-measure concepts
  59. Local and remote sensing
  60. Sink overview
  61. Source-measure considerations
  62. Sweep concepts
  63. Operation mode timing diagrams
  64. measurement overview
  65. measurement functions
  66. Test signal
  67. Force-measure timing
  68. CVU connections
  69. Typical 4210-CVU test connections to a DUT
  70. Test connections to a probe card
  71. Connection compensation
  72. Generate open connection compensation data
  73. Generate short connection compensation data
  74. Generate load connection compensation data
  75. Compensation data
  76. Enable compensation
  77. ABB unbalance errors
  78. Confidence Check
  79. Run an open check and short check
  80. CVU project example
  81. Configure the test
  82. Run the test and review results
  83. Timing diagrams
  84. CVU using voltage sweep
  85. CVU using voltage list sweep
  86. CVU using frequency sweep - DC bias
  87. CVU frequency sweep - DC step
  88. CVU Terminal Settings Advanced settings and circuits
  89. C-V projects
  90. Capacitor I-V and C-V Measurements with Series 700 Project (cap-iv-cv-matrix)
  91. BJT Capacitance Tests (cvu-bjt)
  92. BJT I-V and C-V Tests Using 4200A-CVIV Multi-Switch Project (cvu-bjt-cviv)
  93. High-Voltage C-V Tests Project (cvu-highv)
  94. MOS Capacitor C-V Project (cvu-moscap)
  95. Index
  96. MOS Capacitor Lifetime Test Project (moscap-lifetime)
  97. MOSFET I-V and C-V Tests Using 4200A-CVIV Multi-Switch Project (mosfet-cviv)
  98. Interconnect Capacitance C-V Sweep test (cv-sweep)
  99. MOS Capacitor Mobile Ion Project (moscap-mobile-ion)
  100. MOSFET Project (mosfet)
  101. Nanowire tests
  102. Diode Project (diode-project)
  103. Solar Cell Project (solarcell)
  104. Demo project (default)
  105. Pulse measure and pulse generator units
  106. PGU and PMU connectors
  107. PMU block diagram
  108. Pulse measurement types (PMU)
  109. Sample rate
  110. Model 4225-RPM
  111. Using the RPM as a switch
  112. Waveform capture
  113. PMU common connections
  114. Shield connections
  115. Prober chuck connections
  116. Three-terminal device connections
  117. Four-terminal device connections
  118. Connections to prober or test fixture bulkhead connectors
  119. RPM connections
  120. Configure the PGU, PMU, and RPM using tests
  121. PMU amplitude sweep example (one-channel)
  122. PMU amplitude sweep and step example (two-channel)
  123. Higher channel count test example
  124. PMU connection compensation
  125. Perform connection compensation
  126. Enabling connection compensation
  127. Load-line effect compensation (LLEC) for the PMU
  128. How LLEC adjusts pulse output to the target levels
  129. Coping with the load-line effect
  130. LLEC maintains even voltage spacing
  131. test considerations
  132. Enable LLEC
  133. Disable LLEC and set the output impedance
  134. PMU minimum settling times versus current measure range
  135. PMU capacitive charging/discharging effects
  136. PMU and RPM measure ranges are not source ranges
  137. PGU and 4225-PMU output limitations
  138. A-SCS power supply limitations
  139. Basic troubleshooting procedure
  140. Step 2. Verify the pulse shape
  141. Step 3. Is the pulse level correct for each channel?
  142. Pulse source-measure concepts
  143. Segment Arb waveform
  144. Full arb waveform
  145. Pulse waveforms for nonvolatile memory testing
  146. DUT resistance determines pulse voltage across DUT
  147. Triggering
  148. Pulse source-measure connections
  149. Measurement types
  150. Spot mean average readings
  151. Waveform measurements
  152. Waveform discrete readings
  153. Measurement timing
  154. Clarius
  155. Clarius interface
  156. Set up a simple project
  157. Select project components
  158. Add a device and test to the project
  159. Rearrange items in the project tree
  160. Configure a simple test
  161. Set the key parameters
  162. Run a simple test
  163. Working with My Projects
  164. Create a new project from My Projects
  165. Migrate projects from 4200-SCS systems
  166. Delete a project
  167. View My Projects
  168. Test and terminal setting descriptions
  169. SMU - all terminal parameters
  170. Operation Mode (CVU)
  171. CVU - all terminal parameters
  172. Operation Mode (PMU)
  173. PMU - all terminal parameters
  174. Test settings
  175. Set up a complex project
  176. Customize tests
  177. Link tests or actions
  178. Add actions
  179. Sites
  180. Configure a complex test
  181. Step or sweep multiple device terminals in the same test
  182. Configure actions
  183. Configure sites
  184. Configure subsite cycling
  185. Run a complex test
  186. Cycle a subsite
  187. Multi-site execution
  188. Analyze data
  189. Spreadsheet
  190. Save test results and graphs
  191. Graph
  192. The Formulator
  193. Open the Formulator
  194. Becoming familiar with the Formulator dialog box
  195. Using the Formulator options
  196. Real-time functions, operators, and formulas
  197. Formulator function reference
  198. EXP Formulator function
  199. LN Formulator function
  200. COND Formulator function
  201. MAVG Formulator function
  202. MEDIAN Formulator function
  203. Trigonometry
  204. ATAN Formulator function
  205. DEG Formulator function
  206. SIN Formulator function
  207. Array
  208. FINDD Formulator function
  209. FINDLIN Formulator function
  210. FINDU Formulator function
  211. INDEX Formulator function
  212. INTEG Formulator function
  213. LASTPOS Formulator function
  214. MAXPOS Formulator function
  215. SUMMV Formulator function
  216. Line Fits
  217. EXPFITA Formulator function
  218. EXPFITB Formulator function
  219. LINFIT Formulator function
  220. LINFITSLP Formulator function
  221. LINFITXINT Formulator function
  222. LINFITYINT Formulator function
  223. LOGFIT Formulator function
  224. LOGFITA Formulator function
  225. LOGFITB Formulator function
  226. POLY2COEFF Formulator function
  227. POLY2FIT Formulator function
  228. POLYNFIT Formulator function
  229. REGFIT Formulator function
  230. REGFITSLP Formulator function
  231. REGFITXINT Formulator function
  232. REGFITYINT Formulator function
  233. TANFIT Formulator function
  234. TANFITSLP Formulator function
  235. TANFITXINT Formulator function
  236. TANFITYINT Formulator function
  237. Identify data analysis requirements
  238. Calc worksheet function definitions
  239. ABS Calc worksheet function
  240. ACOSH Calc worksheet function
  241. ASINH Calc worksheet function
  242. ATAN2 Calc worksheet function
  243. AVERAGE Calc worksheet function
  244. COSH Calc worksheet function
  245. EXP Calc worksheet function
  246. HOUR Calc worksheet function
  247. LN Calc worksheet function
  248. LOG10 Calc worksheet function
  249. LOOKUP Calc worksheet function
  250. MATCH Calc worksheet function
  251. MAX Calc worksheet function
  252. MIN Calc worksheet function
  253. MINUTE Calc worksheet function
  254. MONTH Calc worksheet function
  255. NOW Calc worksheet function
  256. PRODUCT Calc worksheet function
  257. SECOND Calc worksheet function
  258. SIN Calc worksheet function
  259. SQRT Calc worksheet function
  260. SUM Calc worksheet function
  261. TAN Calc worksheet function
  262. VARP Calc worksheet function
  263. Add objects to the library
  264. My Settings
  265. Project tree display options
  266. AVMControl user library
  267. chargepumping user library
  268. cvucompulib user library
  269. flashulib user library
  270. hivcvulib user library
  271. HP4294ulib user library
  272. HP8110ulib user library
  273. KI590ulib user library
  274. ki82ulib user library
  275. Matrixulib user library
  276. OVPControl user library
  277. parlib user library
  278. PMU_PCRAM_ulib user library
  279. PRBGEN user library
  280. utilities_ulib
  281. wlrlib user library
  282. AbortRetryIgnoreDialog user module
  283. InputOkCancelDialog user module
  284. OkCancelDialog user module
  285. OkDialog user module
  286. RetryCancelDialog user module
  287. YesNoCancelDialog user module
  288. YesNoDialog user module
  289. Demo Project overview
  290. terminal n-MOSFET tests
  291. diode tests
  292. Testing flash memory
  293. Flash connection guidelines
  294. Endurance testing
  295. Disturb testing
  296. Using a switch matrix
  297. Use KPulse to create and export Segment Arb waveforms
  298. Direct connections to single DUT
  299. Direct connections to array DUT for disturb testing
  300. Embedded computer policy
  301. Keithley Configuration Utility (KCon)
  302. KCon main window
  303. Configuration Navigator
  304. Add an external instrument
  305. Supported external equipment
  306. Add a driver for unsupported equipment
  307. Remove an external instrument
  308. Update preamplifier, RPM, and CVIV Configurations
  309. Update the 4200A-CVIV configuration
  310. System Configuration properties
  311. Instrument properties and connections
  312. KXCI Settings
  313. Set up KXCI for GPIB control
  314. Set up KXCI for ethernet control
  315. command set
  316. Tools
  317. Generate Technical Support Files
  318. KCon Learning Center
  319. Keithley User Library Tool (KULT)
  320. KULT window
  321. Understanding the module parameter display area
  322. Understanding the status bar
  323. Understanding the menus
  324. Develop and use user libraries
  325. Enabling real-time plotting for UTMs
  326. KULT Tutorials
  327. Tutorial 1: Creating a new user library and user module
  328. Tutorial 2: Creating a user module that returns data arrays
  329. Tutorial 3: Calling one user module from within another
  330. Tutorial 4: Customizing a user test module (UTM)
  331. Advanced KULT features
  332. Working with interdependent user modules and user libraries
  333. Understanding user-module locking
  334. Debugging user modules using Microsoft Visual C++
  335. Format user module help to display in the Clarius Help pane
  336. Creating project prompts
  337. Dialog box test examples
  338. Keithley External Control Interface (KXCI)
  339. KXCI communications connections
  340. Ethernet connections
  341. Setting the remote control mode (GPIB or ethernet)
  342. Starting KXCI and the GPIB command interpreter
  343. GPIB status indicators (GPIB communications only)
  344. Logging commands
  345. Logging test results
  346. Graphing the test results
  347. GPIB command set
  348. User mode commands
  349. GPIB command reference
  350. User mode commands (US)
  351. Commands common to system and user modes
  352. Ethernet command reference
  353. SMU default settings
  354. System Mode SMU default settings
  355. Output data formats
  356. Data format for user mode readings
  357. Status byte and serial polling
  358. Bit B1, Syntax Error
  359. Waiting for SRQ
  360. Program 2: Basic source-measure (user mode)
  361. Program 3: Retrieving saved data (system mode)
  362. KXCI pulse generator commands
  363. KXCI CVU commands
  364. Modeless commands
  365. Code examples
  366. Calling KULT user libraries remotely
  367. SystemUtil User Library
  368. KXCI ethernet client driver
  369. Driver functions
  370. KPulse (for Keithley Pulse Cards)
  371. KPulse setup and help
  372. Standard pulse waveforms
  373. Segment Arb waveforms
  374. Exporting Segment Arb waveform files
  375. Custom file arb waveforms (full arb)
  376. Custom Arb file operation: Select and configure waveforms
  377. Custom Arb file operation: Copy waveforms into Sequencer
  378. Custom Arb file operation: Load waveform and turn on output
  379. Waveform types
  380. System administration
  381. Default user accounts
  382. System directories and files
  383. Enable scroll bars in Acrobat Reader
  384. Restore the drive image to factory condition
  385. Protect user files and system software
  386. Read and write permission access to USB ports
  387. Maintenance
  388. Front-panel display
  389. Solid-state hard drive maintenance
  390. firmware upgrade
  391. Calibrate the system
  392. Fan operation
  393. Making stable measurements with SMUs
  394. Multiple SMU stability considerations
  395. Eliminating oscillations
  396. Low-current measurements
  397. Generated currents
  398. voltage burden
  399. Noise and source impedance
  400. Cable capacitance
  401. electrostatic interference
  402. Ground loops and other SMU grounding considerations
  403. LPT library function reference
  404. Lists of LPT library commands
  405. Math operation commands
  406. PGU (pulse only) and PMU (pulse and measure) commands
  407. Pulse source only (PG2) commands
  408. CVU commands
  409. Switch commands
  410. LPT commands for general operations
  411. clrtrg
  412. delay
  413. devint
  414. disable
  415. enable
  416. getinstattr
  417. getinstid
  418. getlpterr
  419. kibcmd
  420. kibdefclr
  421. kibdefdelete
  422. kibdefint
  423. kibrcv
  424. kibsnd
  425. kibspl
  426. kibsplw
  427. kspdefclr
  428. kspdefdelete
  429. kspdefint
  430. ksprcv
  431. PostDataDouble
  432. PostDataInt
  433. PostDataString
  434. rtfary
  435. scnmeas
  436. setmode
  437. sintgX
  438. smeasX
  439. trigcomp
  440. tstdsl
  441. kfpabs
  442. kfpdiv
  443. kfpexp
  444. kfpmul
  445. kfpneg
  446. kfppwr
  447. kfpsqrt
  448. kfpsub
  449. adelay
  450. avgX
  451. bmeasX
  452. bsweepX
  453. devclr
  454. forceX
  455. getstatus
  456. intgX
  457. limitX
  458. lorangeX
  459. measX
  460. mpulse
  461. pulseX
  462. rangeX
  463. setauto
  464. ssmeasX
  465. sweepX
  466. LPT commands for PGUs and PMUs
  467. dev_abort
  468. PostDataDoubleBuffer
  469. pulse_chan_status
  470. pulse_exec
  471. pulse_exec_status
  472. pulse_fetch
  473. pulse_limits
  474. pulse_meas_sm
  475. pulse_meas_timing
  476. pulse_meas_wfm
  477. pulse_measrt
  478. pulse_ranges
  479. pulse_remove
  480. pulse_sample_rate
  481. pulse_step_linear
  482. pulse_sweep_linear
  483. pulse_train
  484. rpm_config
  485. seg_arb_sequence
  486. seg_arb_waveform
  487. setmode (LLEC)
  488. arb_array
  489. arb_file
  490. pg2_init
  491. pulse_burst_count
  492. pulse_current_limit
  493. pulse_dc_output
  494. pulse_delay
  495. pulse_fall
  496. pulse_halt
  497. pulse_init
  498. pulse_load
  499. pulse_output
  500. pulse_output_mode
  501. pulse_period
  502. pulse_range
  503. pulse_rise
  504. pulse_ssrc
  505. pulse_trig
  506. pulse_trig_output
  507. pulse_trig_polarity
  508. pulse_trig_source
  509. pulse_vhigh
  510. pulse_vlow
  511. pulse_width
  512. seg_arb_define
  513. seg_arb_file
  514. asweepv
  515. cvu_custom_cable_comp
  516. dsweepf
  517. dsweepv
  518. forcev
  519. measf
  520. measv
  521. rangei
  522. setfreq
  523. setlevel
  524. smeasf
  525. smeasfRT
  526. smeast
  527. smeastRT
  528. smeasv
  529. smeasvRT
  530. smeaszRT
  531. sweepf
  532. sweepv
  533. programming examples
  534. LPT commands for switching
  535. clrcon
  536. conpth
  537. cviv_config
  538. cviv_display_config
  539. cviv_display_power
  540. delcon
  541. LPT Library Status and Error codes
  542. Customized error texts
  543. Large number reported readings and explanations
  544. Using switch matrices
  545. Matrix card types
  546. Switch matrix mainframes
  547. Typical preamplifier matrix card connections
  548. Typical CVU matrix card connections
  549. Connection scheme settings
  550. Row-column or instrument card settings
  551. Switch matrix control
  552. Signal paths to a DUT
  553. C-V Analyzer signal paths
  554. Keysight Model 8110A pulse generator signal path
  555. Use KCon to add a switch matrix to the system
  556. Step 3. Add switching system mainframe
  557. Step 4. Set GPIB address
  558. Step 7. Set matrix card properties
  559. Step 8. Save configuration
  560. Set up and run a switch matrix in Clarius
  561. Using a Model 590 C-V Analyzer
  562. Capacitance measurement tests
  563. Cable compensation
  564. Using KCon to add 590 C-V Analyzer to system
  565. Cable compensation example
  566. C-V sweep example
  567. CableCompensate590 user module
  568. Cmeas590 user module
  569. CtSweep590 user module
  570. CvPulseSweep590 user module
  571. CvSweep590 user module
  572. DisplayCableCompCaps590 user module
  573. LoadCableCorrectionConstants
  574. SaveCableCompCaps590 user module
  575. Using a Keysight 4284/4980A LCR Meter
  576. Signal connections
  577. GPIB connections
  578. Model 4284A or 4980A test example
  579. HP4284ulib user library
  580. CvSweep4284 User Module
  581. Cmeas4284 User Module
  582. Using a Model 82 C-V System
  583. Connections
  584. Rear-panel connections
  585. Make power and GPIB connections
  586. Model 82 projects
  587. Capacitance tests
  588. Formulas for capacitance tests
  589. Choosing the right parameters
  590. Determining the optimal delay time
  591. Correcting residual errors
  592. CableCompensate82 user module
  593. CtSweep82 user module
  594. DisplayCableCompCaps82 user module
  595. QTsweep82 user module
  596. SaveCableCompCaps82 user module
  597. SIMCVsweep82 user module
  598. Simultaneous C-V analysis
  599. Basic device parameters
  600. Doping profile
  601. Interface trap density
  602. Mobile ion charge concentration
  603. Generation velocity and generation lifetime (Zerbst plot)
  604. Constants, symbols, and equations used for analysis
  605. Summary of analysis equations
  606. References
  607. Articles and Papers
  608. Using a Keysight 8110A/8111A Pulse Generator
  609. Using KCon to add a Keysight pulse generator to the system
  610. PguInit8110 user module
  611. PguSetup8110 user module
  612. PguTrigger8110 user module
  613. Set up a probe station
  614. Supported probers
  615. Example test execution sequence: probesites project
  616. Example test execution sequence: probesubsites project
  617. Understanding site coordinate information
  618. Probe sites (die)
  619. PrInit
  620. PrChuck
  621. PrSSMovNxt
  622. PrMovNxt
  623. Tutorial: Control a probe station
  624. Test system connections
  625. Test flow
  626. Using a Cascade Microtech PA200 Prober
  627. Probe station configuration
  628. Set up communications on the 4200A-SCS
  629. Set up communications on the prober
  630. Set up wafer geometry
  631. Create a site definition and define a probe list
  632. Load, align, and contact the wafer
  633. Aligning the wafer
  634. Verify wafer alignment
  635. Set the chuck heights
  636. Clarius probesubsites project example
  637. Set the wafer map
  638. Use KCon to add a prober
  639. Running projects
  640. Commands and error symbols
  641. Using a Micromanipulator 8860 Prober
  642. Software versions
  643. Probesites Clarius project example
  644. Set spline pattern (optional)
  645. Probesubsites Clarius project example
  646. Using a manual or fake prober
  647. Fake prober overview
  648. Modifying the prober configuration file
  649. software version
  650. Using a Signatone CM500 Prober
  651. Set up communications
  652. Modify the prober configuration file
  653. Set up programmed sites without a subsite
  654. Set up programmed sites with a subsite
  655. Clarius project example for probe sites
  656. Clarius project example
  657. Wafer-level reliability testing
  658. JEDEC standards
  659. Hot Carrier Injection projects
  660. Negative Bias Temperature Instability project
  661. Electromigration project
  662. Charge-to-Breakdown Test of Dielectrics project
  663. HCI degradation: Background information
  664. V-ramp and J-ramp tests
  665. V-ramp test: qbd_rmpv User Module
  666. J-ramp test: qbd_rmpj User Module
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This manual is suitable for:
4200A-SCS