Keithley 4200A-SCS Reference Manual

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Keithley 4200A-SCS Reference Manual Manual pdf 1347 page image

Appendix K: Using a Signatone CM500 Prober Model 4200A-SCS Parameter Analyzer Reference ManualK-18 4200A-901-01 Rev. C / February 2017Probesubsites Clarius project exampleThe following procedure configures a Clarius project to execute testing and automatic wafer steppingto all programmed subsites.Use the 4200A-SCS to do this example. Use Clarius to open and run the probesubsites projectusing the new configuration file, which will allow you to execute the project for this prober.This project uses a Series 700 Switching System and the connect actions to change the instrumentsconnected to each pin without changing the physical configuration.From Clarius:1. Choose Select.2. Select the Projects library.3. Create the probesubsites project.4. Select Configure.5. In the project tree, select the prober-init action.6. Set the mode to 6.Figure 826: Set prober-init mode parameters7. Set the subprobtype. If the CM500 prober is not at its first site, set the subprobtype to 1;otherwise, set it to 0.8. In the project tree, select probesubsites_1.9. Select Run to execute the project.