3-213Operation Examples (Degree of match inspection)*1 *4(TYPE00)OKMEAS. XXXXXXmsMEAS1 CAM1 DEG OF MATCHREGST NO. 00(0~15)MATCH (MDL 0) + 09735 OKX COORD. (MDL 0) X=090.0 OKY COORD. (MDL 0) Y=092.0 OKLIGT LVL (MDL 0) 018.4 OKFinal evaluation result (*2)Measuring timeAverage light level in image windowX-Y coordinates (pixels) ofdetection point[Display of inspection result]Degree of match to reference image (*3)Registration No.F L C1ALLC2NOVX.XMSR-CHNG REG-CHNG PC-MONTR SET-SCRN MANL-TYP-CHGX0~6: Y0~7: BUSY:Continued from the preceding page(12) Degree of match inspectionPress the TRG/BRT key, and the inspection result for image 0 (registration No. 00) will be displayed.*1 Move the cursor to "REG-CHNG" (registration change) with the left and right keys, and pressthe up or down key. The result of evaluating image 1 (registration No. 01) will be displayed.*2 The final evaluation result will be displayed as "OK" in the upper left corner of the screen whenall of the items have been evaluated as acceptable. If there is a single unacceptable item,"NG" will be displayed.*3 "MATCH:+09735" means that the degree of match (percentage of pixels that match) betweenan object image and the reference image is 97.35%.[The acceptance and rejection criteria based on the degree of match]In order to evaluate acceptability based on the degree of match, first an image of a goodspecimen is stored for reference. Then, an image of defective specimen is compared fordegree of match. Finally an image of another good specimen is compared. Thesecomparisons establish the degree of match to be used for setting the limits used for workingcomparisons.For example, the degree of match for a non-defective object is 90% or more and that for adefective object is 70% or less, then the threshold value for degree of match can be set toapprox. 85%. This allows the evaluation acceptability to be made.*4 When the final evaluation result is OK, Y0 is turned ON, and a filled box is displayed. (Whenthe result is NG, an empty box is displayed.)When the auxiliary relay C112 is turned ON, Y0 is turned ON according to the condition set instep (10) for final evaluation output.
