Ulvac ULK-04A Instruction Manual

Contents

Ulvac ULK-04A Instruction Manual Manual pdf 66 page image

SK00-4802-DI-002-04No.16.10.20498.4 Response procedure(1) Domestic business in Japan:ULVAC send a replacement or Buyer return the defective items to ULVAC, Inc. or to the localULVAC representatives for repair. If field service is required, Buyer shall ask ULVAC, Inc. or thelocal ULVAC representatives.(2) Direct export transaction:ULVAC send a replacement or Buyer return the defective items to ULVAC, Inc. or to the localULVAC representatives for repair. Return charge shall be paid by Buyer.8.5 Disclaimer(1) Failure occurred after expiration of warranty period(2) Failure caused by force majeure, such as fire, storm and flood damage, earthquake, lightningstrike, war etc.(3) Failure occurred due to carelessness handling or faulty usage.(4) Products remodeled, disassembled or repaired without ULVAC’s acceptance(5) Failure occurred under abnormal environment, such as intense electromagnetic field,radiation,high-temperature, high-humidity, flammable gases, corrosive gases, dust etc.(6) Failure occurred by noise.(7) Product deficiency or secondary indemnification occurred to Buyer.(8) Product deficiency or secondary indemnification occurred to Buyer, from law suit to ULVAC bythird party for patent infringement.(9) The reason of the failure deemed below the specified usage condition by ULVAC technical staff.The normal service conditions are as follows:(a) Operating atmospheric temperature: 10 to 40℃(b) Type and temperature of exhaust gas: Dry air or dry nitrogen; 0 to 40℃(c) Operation in compliance with instructions manual(10) Consumable parts.

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