Ulvac ULK-04A Instruction Manual

Contents

Ulvac ULK-04A Instruction Manual Manual pdf 20 page image

SK00-4802-DI-002-04No.16.10.2031.1.5 Leakage of high-temperature cooling waterFactor How to avoid / MeasureHigh-temperature steam generatedby boiling cooling water spouts fromthe inlet and outlet of the pumpcooling water due to operationwithout supplying the cooling water.(1) Provide an interlock. In the route of the system,install a flowmeter to stop the pump when thesupply of cooling water stops.(2) If the operation is started without supplying thewater, stop the pump and keep away from thepump.(3) Stop the pump and make sure that the pumptemperature becomes low. Then remove thepump for inspection.1.1.6 Rise of oilFactor How to avoid / MeasureThe pump's back pressure is highand the pumping action is lost,causing back-flow of the oil.Critical back pressureULK-04A（D-11）：40PaULK-04A（D-31）：60PaULK-06A（D-11）：40PaULK-06A（D-31）：60PaULK-10A（D-11）：35PaULK-10A（D-31）：40PaULK-14A（D-11）：30PaULK-14A（D-31）：30PaAn oil diffusion vacuum pump loses its pumpingaction if the pump outlet pressure becomes higherthan the critical back pressure. In this case, the oilsteam spouts scattering and back-flows to the highvacuum section.(1) For the auxiliary pump, use one that hassufficient pumping performance.(2) Do not operate this unit with the outlet cloggedor with any equipment installed on the outletside which prevents gas from passing.(3) Make sure that the valve for evacuation is openbefore evacuation.(4) Make sure that the back pressure and thepressure in the high vacuum section aresufficiently low before operating this unit.CAUTIONWARNING