SK00-4802-DI-002-04No.16.10.2062. Overview2.1 About oil diffusion pumpThe principle of an oil diffusion pump is that gas molecules coming into the pump inlet are capturedby injected stream and flow downstream with the injected stream. The gas molecules flowingdownstream by the injected stream cannot pass through the thick upstream layer of injected streamand further flow downstream. The injected stream then comes into collision with the water-cooledpump case surface, condenses there, discharges thermal energy, turns into liquid again.The oil diffusion pumps under the ULK series are each largely classified into the following fourparts:1) Four-stage injection nozzle (Aluminum)2) Pump case with cooling water pipe (Stainless)3) Boiler to heat oil up4) Air outlet baffle nozzle to prevent oil consumptionFigure 1: Part name of ULK type oil diffusion pumpNozzleCooling water inletPump caseBoiler (Cover)Terminal boxAir inlet(Loose type flange)Air outlet baffleCooling water outletAir outlet(Loose type flange)Oil filler portOil drain port
