Ulvac ULK-04A Instruction Manual

Contents

Ulvac ULK-04A Instruction Manual Manual pdf 51 page image

SK00-4802-DI-002-04No.16.10.2034No. Name1 Cross-recessed panheadmachine screw M4 × 52 Expansion ring3 Expansion ring retainer4 Nozzle ring5 Cold cap6 Bearing case7 Bearing ※18 Shaft ※19 Nozzle10 Fractionating plate ※211 Nozzle fixing ring ※2Figure 10: Nozzle pull-out instruction diagram for ULK-04A, ULK-06ANo. Name12 Hot cap13 Hexagon nut M514 Screw15 Fixing ring (A) ※316 1st steam tower17 Spring washer M518 Hexagon nut M819 Spring washer M820 2nd steam tower21 3rd steam tower22 4th steam tower23 Long bolt24 5th steam tower25 Washer ※426 Hexagon nut M8: 3 types*3: Shims for clearance adjustmentare inserted in some cases.*4: Dedicated washers.Figure 11: Exploded diagram of nozzle for ULK-04A, ULK-06APull out the nozzles inthe order of ① to ⑪.*1: The bearings and the shaft are swaged.*2: In ULK-04A, the nozzle fixing ring and thefractionating plate are integrated.