Ulvac ULK-04A Instruction Manual

Contents

Ulvac ULK-04A Instruction Manual Manual pdf 60 page image

SK00-4802-DI-002-04No.16.10.2043For ULK-10A,ULK-14ASee Figs. 15, 16.(1) Figure 15Attach the parts ① to ⑮ in the numerical order.At this point, spread evenly thermo cement of 1 to 2 mm in thickness across the side wherethe heater pump is attached.Remove the thermo cement coming out of the joint surface between the heater and thepump.(2) Figure 16Connect the lead wires of the heater (the two lead wires from the terminal box) to the heaterterminal.(3) Figure 16Cover the glass wool tube ⑤ on the lead wires of the heater.Draw the lead wires of the heater into the terminal box and carry out wiring according to Fig.17.(4) Connect the wires on the primary side.Note that if heated under the condition where the thermo cement is not dried enough, thecement spout, resulting in an improper condition.6.3 Inspection after storage for long period of timeIf the vacuum pump is stored for a long period of time without operation, it may not work properlydue to occurrence of rust etc. If it has not been used for a long period of time, make a request ofyour nearest service center to perform inspections.6.4 OverhaulThe inspection items are as mentioned above. However we recommend periodical overhauls underthe condition where the pump is polluted or its performance deteriorates excessively depending onthe service conditions.Overhauls are necessary to maintain the performance (including safety) and continue scheduledproduction.For overhauls, contact your nearest service center described at the end of this document.Note that you are requested to complete and submit the pollution certificate attached to the end ofthis document.Carry out an overhaul once a year.In addition, if the pump is polluted or its performance deterioratesexcessively under your service conditions, carry out an overhaul evenif it is within one year.In an overhaul, at least the parts described in "9. Main replacementparts" need to be replaced.CAUTION