Ulvac ULK-04A Instruction Manual

Contents

Ulvac ULK-04A Instruction Manual Manual pdf 33 page image

SK00-4802-DI-002-04No.16.10.2016(1) It is designed to cause no leakage under the specified condition andwater leakage tests have been done. However water leakage mayoccur under abnormal conditions outside the specifications (such asan abnormal increase in water pressure). In such a case, unless thesupply from the unit stops, the water leakage continues. Do not installelectrical equipment and wiring on the floor under or near the pump.(2) It is recommended to install a water leakage sensor on the floor belowthe pump and incorporate it into the interlock system of the unit.If water leakage is detected, immediately stop the pump and close thesupply valve (HWSV) for cooling water.After closing the valve, attach a "Closed" tag to the handle.(3) Install a flowmeter to the cooling water supply source, such as theunit, so that it can be visually checked that water flows and aninterlock can be installed in order to allow operators to check whetherthe water flows.3.4 Intake port pipe (Connection to vacuum chamber side)(1) Thoroughly clean the inside of the vacuum chamber, piping, vacuum valves, etc. and thenconnect to the pump. If it is connected under a dirty condition, the ultimate pressure becomeshigher or the time required for the pressure to decrease down to a given pressure becomeslonger.Do not touch any part under vacuum by bare hands but wear clean nylon gloves.(2) Remove the gaskets set on the inlet and outlet port flanges, lightly wipe them with a clothmoistened with a solution, such as alcohol to remove dirt on the surface.(3) Do not apply even grease with a low vapor pressure to the gasket surfaces.Only wipe dirt off.(4) Also wipe the gasket grooves on the flange and the corresponding flange surfaces with a cleancloth.(5) Set gaskets in place.(6) Connect the inlet port with the piping using a JIS vacuum flange.(1) If the pump suctions solid substances or moisture, such as dust andfine powder, not only the ultimate pressure may deteriorate but also itis broken down.(2) For a leak valve on the inlet port side with respect to this unit, installas near the vacuum chamber as possible.CAUTIONCAUTION