Ulvac ULK-04A Instruction Manual

Contents

Ulvac ULK-04A Instruction Manual Manual pdf 50 page image

SK00-4802-DI-002-04No.16.10.20336.2.4 Disassembling of pumpIf a large amount of tar substance adheres to the nozzle surface or the inside surface of the pumpcase, it is necessary to disassemble and clean the pump.For ULK-04A, ULK-06ARemoval of pump from line(1) Remove the electric wires from the terminal box.(2) Remove the thin flex tubes for cooling water.(3) Remove the tightening bolts for the inlet and outlet port flanges embedded in the system.(4) Place the removed pump on a flat surface.Removal and disassembling of nozzle (See Fig. 10.)(1) Pull up the air inlet gasket.(2) Remove the screw ① attached to the latch of the cold cap ⑤.Pull out the expansion ring retainer ③ and the expansion ring ②.(3) Take up the nozzle ring ④.Also remove the cold cap ⑤, bearing case ⑥, bearing ⑦, and shaft ⑧.(4) Hold the 1st steam tower ⑬ just under the hot cap ⑫ and pull up the nozzle ⑨.(5) Remove the fractionating plate ⑩ and the nozzle fixing ring ⑪.In ULK-04A, the nozzle fixing ring ⑪ and the fractionating plate ⑩ are integrated.(6) For the nozzle system, pinch the 1st steam tower ⑬ with your fingers and turncounterclockwise. Then the upper and lower parts split.See Figure 11.(7) The upper part can be removed by turning the hot cap ⑫ counterclockwise.(8) The steam tower can be disassembled into pieces by removing the hexagon nut ⑬.(9) When the hexagon nut ⑱ is loosened, the 2nd steam tower ⑳, the 3rd steam tower ㉑, the4th steam tower ㉒, and the 5th steam tower ㉔ are removed.