Ulvac ULK-04A Instruction Manual

Contents

Ulvac ULK-04A Instruction Manual Manual pdf 17 page image

SK00-4802-DI-002-04No.16.10.20Contents-3Drawing ListFigure 1: Part name of ULK type oil diffusion pump .................................................................................. 6Figure 2: Oil diffusion vacuum pump Model No.ULK-04A, Dimensional appearance drawings ............ 9Figure 3: Oil diffusion vacuum pump Model No. ULK-06A, Dimensional appearance drawings ......... 10Figure 4: Oil diffusion vacuum pump Model No. ULK-10A, Dimensional appearance drawings ..........11Figure 5: Oil diffusion vacuum pump Model No. ULK-14A, Dimensional appearance drawings ......... 12Figure 6: Connection of outside lines to terminal box for ULK-04A/ULK-06A ......................................... 20Figure 7: Connection of outside lines to terminal box for ULK-10A/ULK-14A ......................................... 20Figure 8: Example of thermostat connection circuit ................................................................................. 27Figure 9: Oil replacement instruction diagram ......................................................................................... 31Figure 10: Nozzle pull-out instruction diagram for ULK-04A, ULK-06A................................................... 34Figure 11: Exploded diagram of nozzle for ULK-04A, ULK-06A .............................................................. 34Figure 12: Exploded diagram of nozzle for ULK-10A, ULK-14A ............................................................. 36Figure 13: Exploded diagram of 1st steam cylinder for ULK-10A, ULK-14A........................................... 37Figure 14: Diagram on removal of heater of ULK-04A, ULK-06A ........................................................... 40Figure 15: Wiring diagram in terminal box for ULK-04A, ULK-06A ......................................................... 41Figure 16: Removal of heater of ULK-10A, ULK-14A .............................................................................. 41Table 1: Performance specifications .......................................................................................................... 7Table 2: Oil diffusion vacuum pump: Current value of ULK series .......................................................... 18Table 3: Trouble check list ........................................................................................................................ 44Table 4: List of main replacement parts ................................................................................................... 50Graph 1: Pumping curve for ULK-04A/ULK-06A ....................................................................................... 8Graph 2: Pumping curve for ULK-10A/ULK-14A ....................................................................................... 8