Table of Contents3BUR002418-600 A 7Unit Overview Display ....................................................................................................78Unit Detail Display..........................................................................................................80Unit Detail Display Format ..................................................................................80Loading the Sequence from the Unit Detail Display ...........................................81Loading a Recipe from the Unit Detail Display...................................................82Changing Sequence State, Mode, and Status .......................................................82Sequence Detail Display..................................................................................................84Sequence Detail Display Format..........................................................................85Choosing a Sequence for Sequence Detail...........................................................85Changing Sequence State, Mode, and Status .......................................................85Manipulating Sequence Steps ..............................................................................85SFC (Sequential Function Chart) Display .......................................................................86SFC Display Format.............................................................................................87SFC Display Operation ........................................................................................88Sequence Debug Display.................................................................................................91Sequence Debug Display Format .........................................................................91Choosing a Sequence for Debug Display.............................................................92Sequence Source ..................................................................................................92Changing Sequence State, Mode, and Status .......................................................92Sequence Debug Program Functions ...................................................................92Recipe Detail ...................................................................................................................97Recipe Detail Display Format ..............................................................................97Changing Recipe Values ......................................................................................98TCL Array Plot Display ..................................................................................................98TCL Array Plot Format ........................................................................................98Using TCL Array Plot..........................................................................................98Batch Connectivity to M0D 300....................................................................................101Section 5 - TLL DisplaysSegment Display............................................................................................................103Segment Display Fields and Buttons .................................................................105Faceplates for Program Elements.......................................................................106Register Display ............................................................................................................108