certifiedQM-Systemgeprüft esQM-SystemISO 9001EN 29001Installation, Operating, and Maintenance InstructionsSeries 64.1VAT Vakuumventile AG, CH-9469 Haag, SchweizTel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email reception@vat.ch http://www.vatvalve.com225590EE2005-04-26 4/162.3 PM Configuration (setup sequence)STEP LOCAL MODE (PM-4 in combination withService Box only)REMOTE MODE (PM-5 if interface installedonly)1 POWER ON 1. PM controller: Turn on power switch at the rear panel of the PM controller. Note: Valve will close, if not inclosed position2. On PM-5 or Service Box start-up display (Software version, type of interface, etc.) appears, until valve is inclosed position3. CLOSE(D) is displayed, otherwise please refer to chapter ‘6 Trouble Shooting’.2 SELECTMODESelect LOCAL operation by pressing «LOCAL» key for 2seconds.Select REMOTE operation by pressing «REMOTE» keyon front panel or Service Box for 2 seconds or selectremote operation through RS232 (see ‚9.3.1 Controlcommands’) or logic interface (see ‚9.1.3.1 Logicinterface‘)3 AUTOMATICSIZEADJUSTMENTPress simultaneously «OPEN» and «CLOSE» keys for 2seconds. The controller will perform an automatic sizeadjustment procedure to determine open and closedposition and the range between the two positions.Send RS232 command:J: (see ‚9.3.1 Control commands’)or use Logic command (see ‚9.1.3.1 Logic interface‘)4 SENSORSETUP 1)Press simultaneously «LEARN» and «ZERO» key for 2seconds (notation used hereafter: «&», e.g. «LEARN» &«ZERO»). Then, use «↑» and «↓» key to changeparameters (VOLTAGE RANGE; DISPLAY RANGE;DISPLAY UNIT; GAIN FACTOR; SENSOR TYPE; ZEROADJUST) for each sensor. Toggle with «F1» key to thenext setup parameter. Press «F2» , when finished.See ‚9.3.3 Sensor setup command‘Example:Sensor 1, Voltage Range: 0-10V; Display Range: 0-10;Display Unit: Torr; Gain Factor: 1; Sensor Type: Torr;Zero Adjust: enabled;s:1332010Mind: Not possible to do by a logic interface.5 ZERO ADJUST(Offsetcompensation ofsensor output)Evacuate process chamber to high vacuum. When thebase pressure is reached, press «ZERO» key for 2seconds to reset the offset of the pressure sensor.Disable ZERO function in SENSOR SETUP, if the basepressure of your system is higher than 1‰ of sensor fullscale.Evacuate process chamber to high vacuum. When thebase pressure is reached send RS232 command:Z: (see ‚9.3.1 Control commands’)or use Logic command (see ‚9.1.3.1 Logic interface‘).Disable ZERO function in SENSOR SETUP, if the basepressure of your system is higher than 1‰ of sensor fullscale.6 LEARN 2)(Determination ofcontrolcharacteristics ofyour processchamber)Process chamber at high vacuum, control valve is open:Open gas inlet and set gas flow (see recommendationbelow). Press «LEARN» key for 3 seconds to performthe autolearning routine of the PM controller. Theautolearning routine may take several minutes and canbe aborted by pressing the «F1» key. A single full run ofthe autolearning routine is required to ensure fast andaccurate pressure control.Note: It is not necessary to repeat LEARN, if thesensor setup is changed, or if the secondsensor is selected for pressure control. Thecontroller covers 5% to 5000% of the gasflowwhich was used at LEARN.Process chamber at high vacuum, control valve is open:Open gas inlet and set gas flow (see recommendationbelow). Then send RS232 LEARN command:L:001000 (‚9.3.1 Control commands’)or Logic command (see ‚9.1.3.1 Logic interface‘).The autolearning routine may take several minutes. Asingle full run of the autolearning routine is required toensure fast and accurate pressure control.Note: It is not necessary to repeat LEARN, if thesensor setup is changed, or if the secondsensor is selected for pressure control. Thecontroller covers 5% to 5000% of the gasflowwhich was used at LEARN.Legend:1) The default GAIN FACTOR is 1.00. See chapter ‚9.3.3 Sensor setup command‘ if resetting is necessary. gain factor > 1 means: faster control but higher overshoot of pressure gain factor < 1 means: slower control but lower overshoot of pressureJust 98% of sensor pressure range can be used during control.If no sensor is used, select as display parameter ‘POS’.2) Ideal gasflow for autolearningQ = 40 • pSFS • L minQ...........gasflow for autolearning [sccm]pSFS.......sensor full scale pressure [Torr]Lmin ........min. controllable conductance [l/s]Do not use a different gasflow thanrecommended for autolearning otherwisepressure control performance may be insufficient.valve size DN63 DN100 DN160 DN200 DN250 DN320 DN400min. controllable conductance 0.6 l/s 1 l/s 1.6 l/s 2 l/s 2.5 l/s 3.2 l/s 4 l/s
