OneStart

Menu

Karl Suss MA6 Operating Manual

Also see for MA6: Operating manual

Page 1 preview
Page 2 preview
Page 3 preview
Page 4 preview
Page 5 preview
Page 6 preview
Page 7 preview
Page 8 preview
Page 9 preview
Page 10 preview
Page 11 preview
Page 12 preview
Page 13 preview
Page 14 preview
Page 15 preview
Page 16 preview
Page 17 preview
Page 18 preview
Page 19 preview
Page 20 preview
Page 21 preview
Page 22 preview
Page 23 preview
Page 24 preview
Contents
  1. Table Of Contents
  2. Picture and Location
  3. Substrate Size
  4. Top Side Alignment
  5. Wafer Alignment
  6. Wafer Exposure
  7. Mask Unloading
  8. Process Recording during the Process
  9. Clean up
Karl Suss MA6 Operating Manual Manual pdf 24 page image
NANOSYSTEM FABRICATION FACILITY (NFF), HKUSTVersion 1.1 Page 24 of 242. Write down any problems or comments in the log sheets.4.16 Clean upClean the chuck and make sure everything is back to the original place.4.17 Check outCheck out the equipment in the NFF equipment reservation website or CardReader after use.4.18 Machine Shutdown (For Staff ONLY!)1. Press “CHANGE MASK” key and the mask holder will be released. With themask vacuum ON, pull the mask holder out, flip it 180° and store it on the tray tothe left compartment. Press “ENTER” key to switch the mask vacuum OFF.Retract the mechanical clamping and remove the mask.2. Toggle Power Switch Electronic to position OFF.3. Turn off the CIC by pressing on the OFF button.- Leave nitrogen on for 30minutes, and then turn it off.
/ 24
Related manuals for Karl Suss MA6
Karl Suss MA6 Operating Manual first page preview
Karl Suss MA6 Operating Manual
This manual is suitable for:
MA6
Product
Menu
Learn More
Menu
Legal
Menu
Copyright © 2024 OneStart. All Rights Reserved