Keithley 9139B-PCA Instructions Manual

Keithley 9139B-PCA Instructions Manual Manual pdf 26 page image

Model 9139B Probe Card Adapter Instructions Section 3: Installation9139B-901-01 Rev. A / January 2019 3-7Light cover and microscope clearanceCheck the light cover and microscope clearance. Most microscopes are located far enough above theprobe card assembly that they do not present clearance problems when the light cover is installed.Some microscopes may protrude into the probe ring assembly to the area below the shield plate. Thispresents clearance problems. If the microscope is mounted on a pivoted arm, move the microscopeaside and then install the light cover.Installation procedureHazardous voltages may be present on an installed probe card even after the output isdisconnected, that if contacted, may cause personal injury or death.To install the 9139B Probe Card Adapter:You must supply all connections and hardware associated with vacuum hosing, in addition to thevacuum source.1. Unpack and inspect 9139B (see Handling precautions (on page 1-4) for special handlinginformation).2. Remove all power from the parametric test system.3. Install the probe card adapter in your prober, following the instructions provided with the prober.The hardware supplied with your probe card adapter assembly varies depending on the type ofprober you have.See Mechanical specifications (on page 6-1) to determine if your prober is compatible. If youneed assistance with your specific prober configuration, contact your sales representative.4. Route 0.635 cm (1/4 in.) outside diameter vacuum hose (provided) to the probe card adapter,away from any moving parts of the prober. Make sure the hose remains clear of any pinch pointsthat could cut off or restrict flow through the vacuum hose.5. Install the 9139B to a vacuum hose. Route a section of vacuum hose from the PCA through the"TO PCA" grommet on the vacuum control box.6. Connect the vacuum control box end of the hose to valve PF-1 (see the following figure) and theother end of the hose to the PCA.